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| 品牌 |
ABB |
型号 |
GJR2372100R3 |
| 类型 |
DCS |
性能 |
即插即用 |
| 适用范围 |
工业 |
加工定制 |
否 |
| 是否进口 |
是 |
|
为了提高从悬臂反射回来的激光束的强度,悬臂的下侧经常覆盖有几十纳米的反射金属涂层。硅原子力显微镜探头的反射膜通常由铝和金片制成。云母和高度有序的热解石墨最常用于 AFM 成像。
组装原子力显微镜的步骤
有各种类型的原子力显微镜,每种的组装方法可能会有所不同。在此一个特定的子类型是有利的,该子类型将展示其组装的一般概念的示例。
Keysight AFM 7500是一款且用途广泛的仪器。它由光学柱、显微镜组件、底板、AFM 主体、门、扫描仪以及 LED 灯和艾伦键等附加组件组成。
最初,底板设置在平坦表面上,因为不规则表面会改变读数。光学显微镜组件沿光学柱向下滑动是 AFM 组装的下一步。然后将其旋转到操作所需的特定位置,然后使用内六角扳手拧紧螺钉以固定位置。必须记住,它不应该完全固定,以便稍后在发生任何变化的情况下进行一点旋转。
接下来,将 AFM 主体放在底板上。它垂直和横向调整,使其所有四个腿都插入底板的四个孔中。要对齐和聚焦显微镜,扫描仪是必不可少的。它是倒置的,调节旋钮必须朝向用户。然后将其插入体内。
扫描仪的杠杆旋转到它们的平行位置并向下推以完全固定扫描仪。接下来,在杠杆的帮助下,光学显微镜被倾斜和旋转以将其完全固定在相对于扫描仪的位置。显微镜上的变焦环必须完全缩小才能正确对焦。这是在计算机软件的帮助下完成的。然后将 LED 灯插入 AFM 主体的腔室以确保光的传输。
现在,完成的旋转,显微镜完全固定到位。有两个旋钮用于调整 XY 平移,重复平移过程直到可以看到悬臂的。焦距调节旋钮位于显微镜后面。在查看计算机屏幕上的光学视图时,可以旋转它来上下移动显微镜。
激光对准调节旋钮集成在扫描仪中。接下来,激光和探测器对齐,然后 AFM 准备好运行。
未来展望
发表在《半导体制造的计量、检测和过程控制》杂志上的文章向读者介绍了 AFM 技术的进展。与标准 AFM 系统相比,头部小型化和重新配置的新方法可将性能提高 40 倍。
小型化使许多头能够在晶片上并行操作。当与带宽增强相结合时,这可能会导致比典型的在线 AFM 方法提高两个数量级。迷你 SMP 集成头的发明还实现了嵌入式监控。当检测到的-样品张力达到阈值范围时,实现快速准确的样品检测。
简而言之,AFM 显微镜已成为多功能传感的新领域。全世界都在进行研究以提高其性能和效率,并针对各个行业对其进行优化。
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There are various types of atomic force microscopes and the assembling methods for each may vary. It is advantageous here to specify a particular subtype that would present an example of the general concept of its assembly.
The keysight AFM 7500 is a famous and vastly utilized instrument. It consists of an optical column, the microscope assembly, the base plate, the AFM body, the gate, scanner, and additional components such as an LED light and Allen keys.
Initially, the base plate is set on a flat surface as irregular surfaces alter the readings. The sliding of the optical microscope assembly down the optical column is the next step in the assembly of AFM. It is then rotated to the specific position required for the operation and then an Allen key is used to tighten the screws to fix the position. It must be remembered that it shouldn’t be completely fixed so that later on a bit of rotation is possible in case of any changes.
Next, the AFM body is put on the base plate. It is adjusted vertically and laterally so that all four of its legs are inserted into the four holes of the base plate. To align and focus the microscope, the scanner is essential. It is inverted and the adjustment knob must be towards the user. It is then inserted into the body.
The levers of the scanner are rotated into their parallel position and pushed down to completely fix the scanner. Next, with the help of a lever, the optical microscope is tilted and rotated to fix it completely in position with respect to the scanner. The zoom ring on the microscope must be completely zoomed out for proper focus. This is done with the help of computer software. LED light is then inserted into the chamber of the AFM body to ensure the transmission of light.
Now, the final rotation is done and the microscope is completely fixed in position. There are two knobs for the adjustment of XY translation, and the translation process is repeated until the tip of the cantilever is visible. The focus adjustment knob is situated behind the microscope. It can be rotated to move the microscope up and down while looking at the optical view on the computer screen.
The laser alignment adjustment knob is integrated into the scanner. Next, the laser and detector are aligned, and then the AFM is ready for operation.
Future Perspective
The latest article published in the journal Metrology, Inspection, and Process Control for Semiconductor Manufacturing informs readers regarding the latest advancements in AFM technology. The new approach of miniaturizing and reconfiguring the head enables a 40x boost in performance over standard AFM systems.
Miniaturization enables many heads to operate in parallel across a wafer. When accompanied with the bandwidth enhancement, this might result in a two-order-of-magnitude improvement above typical inline AFM methods. The invention of the mini SMP-integrated head also enables embedded monitoring. When the detected tip-sample tension reaches a threshold range, quick and accurate specimen detection is achieved.
In short, AFM microscopy has emerged as a novel field for multipurpose sensing. Research all over the world is being conducted to improve its performance and efficiency, optimizing it for various industries.