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| 型号 |
FPSTA-8MTL220 |
工作原理 |
机械式 |
| 精度 |
1um |
加工定制 |
是 |
| 重量 |
32 |
厂家 |
www.felles.cn/pingyitai.html |
这款高承载直驱直线平移台是高精度线性直驱平移台Direct Drive Linear Translation Stage,采用光学编码器和3相无铁线性无刷伺服电机技术,为用户带来零反冲高精度平移运动,具有独特的平移精度高,重复精度高和摩擦低的特点。
(上述价格不一定准确,请您联系我们获得准确报价)
高承载直驱直线平移台采用线性非接触式光学编码器作为反馈系统,使得位置控制高达亚纳米级分辨率。
高承载直驱直线平移台采用自然老化铝合金确保了平移台高温稳定性和轻巧性,以及优良的长周期运动,导轨系统不会发生漂移。
高承载直驱直线平移台可以用于洁净空间环境或真空度10^-3Torr的真空环境,也可根据用户要求提供高真空直驱平移台。
高承载直驱直线平移台可以轻松地直接连接到光学平台上,可直接安装搭建成电动Y二维平移台,无需使用任何连接板。
高承载直驱直线平移台还可以安装到花岗岩龙门架或高精度平台上实现高精度平移定位。

图1:高承载直驱直线平移台实物图
高承载直驱直线平移台特点
直接驱动无反冲backlash系统
+/-0.5um双向重复定位精度
高分辨率非接触式光学编码器
高精度线性导向和运载系统
超长使用寿命
方便集成到各种平台或光学机械系统中
Y二维位移台的正交性高达<=5arcsec
非常适合激光打标,激光钻孔,激光划线,激光雕刻等应用
具有灰尘防护能力
高承载直驱直线平移台规格
| Model | 8MTL220-400-LEn1 | 8MTL220-600-LEn1 |
| Kinematics & Feedback information | ||
| Travel Range, mm | 400 | 600 |
| Encoder Type | Optical | |
| Encoder Model | LEN1 | |
| Encoder Resolution | Any of the range: 25 nm to 5 μm (on demand) | |
| Encoder Interface | Differential RS422 | |
| Internal Multiplier | YES | |
| Multiplication factor 1) | 4-200 (on demand) | |
| Encoder Grating Period, μm | 20 | |
| Reference Mark (Index) | Yes | |
| Absolute Accuracy 2) | ||
| Before Calibration, μm | ±10 | ±12 |
| After Calibration, μm | ±1 | ±1 |
| Uni-Directional Repeatability, μm | N/A | |
| Bi-Directional Repeatability (peak to peak) 2), μm | ±0.5 | |
| Bi-Directional Repeatability (RMS) 2), μm | ±0.26 | |
| Pitch 3), μrad / arcsec | ±30 / ±6.20 | |
| Yaw 3), μrad / arcsec | ±30 / ±6.20 | |
| Roll, μrad / arcsec | N/A | |
| Maximum Velocity (with load 4kg) 4), mm/s | <2000 | |
| Maximum Acceleration (with load 4kg) 5), mm/s2 | <20000 | |
| Limits Switches Type (Safety) | Optical (Optrons) | |
| Limit Switch Polarity (Safety) | Pushed is closed | |
| Limit Switch Voltage, V | 5…24 | |
| Load, Guiding & Transmission Information | ||
| Design Type | Linear Motor Stage | |
| Linear Motor Model | LM4 | |
| Linear Motor Design Type | Ironless BLDC motor | |
| Maximum Bus Voltage, VDC | >300 | |
| Load Capacity (Centrally Placed) 6) | ||
| Horizontal, kg | 100 | |
| Vertical, kg | N/A | |
| Moving Mass 7), kg | 9.5 | |
| Guiding System | Recirculating linear rails and carriages units with caged balls
| |
| Material & Environment Conditions | ||
| Housing Material | Aluminum Alloy | |
| Housing Coating (Finish) | Black Anodizing | |
| Environment Pressure | Normal Atmosphere | |
| Operating Temperature, °C | 20±2 | |
| Control, Communication and Cabling | ||
| Recommended Controllers 8) | ACS Products Line or 8SMC5-USB series | |
| Recommended Drivers 8) | ACS Products Line or 8SMC5-USB series | |
| Recommended Power Supply 9) | 2 phase / 3 phase source | |
| Recommended Communication Interface 12) | EtherCAT / RS232 / USB / TCP-IP | |
| Cable Length, m | 2 (other by request) | |
| Differential Outputs 10) | On request | |
| Accessories Information | ||
| Base Plate for Mechanical Interface | Not required | |
| Y Stack | Directly | |
| Z Configuration | Not available
(choose from other Standa stages series)
| |
| Additional Details | ||
| Dimensions of Moving Platform (W x L), mm | 225 x 225 | |
| Overall Linear Stage Dimensions (W x L x H), mm | 780 x 297.5 x 100 | 980 x 297.5 x 100 |
| Measurement System | Metric | |
| Orthogonality (Y Configuration) 11), μrad / arcsec | 24 / 5 | |
| Protection Level | From solid particles and spray | |
| RoHS | Compliant | |
| Weight, kg | 37 | 46 |
1) 默认为x4转PPR-脉冲数/每转,模拟SIN/COS编码器接口
2)绝dui精度和双向重复定位精度采用Zygo ZMI 501 Michelson laser interferometer测量计算
3) Pitch & Yaw 采用电子自相关仪器测试,电子自相关仪分辨率1μrad. 环境误差1μrad.
4) zui大速度由编码器限制和驱动器CUT-OF频率以及导向系统限制.
5)zui大加速度由驱动器“Peak Current, Motors` Peak Current and External Load (inertia)决定.
6)负载能力由导向系统决定.
7) 运动质量是系统常数m0,通常是没有负载时的惯性。
8) 推荐的控制器和驱动器有助于发挥电动平移台的性能.
9) 推荐的电源是根据用户的占空比和负载来选择.
10) 差分输出接口,可提供主动或被动LCMv2接口.
11) 可组成正交性能更好的Y二维电动位移台系统.
12) 标量控制可采用USB / TCP-IP / RS-232通讯接口,矢量控制建议采用EtherCAT接口。
13) 平移台包括特殊封盖,可用于灰尘严重或湿度较大的环境